Modeling of Different Shaped Micro-Cantilevers Used as Chemical Sensors

G. Louarn, M. Collet, and S. Cuenot
Institut des Matériaux Jean Rouxel, Nantes

In this work, we present the modeling of V-shaped silicon micro-cantilevers.

The sensitivity of different V-shaped silicon cantilevers is estimated, as a function of the geometrical dimensions of the cantilever.