See How Multiphysics Simulation Is Used in Research and Development

Engineers, researchers, and scientists across industries use multiphysics simulation to research and develop innovative product designs and processes. Find inspiration in technical papers and presentations they have presented at the COMSOL Conference. Browse the selection below or use the Quick Search tool to find a specific presentation or filter by application area.


View the COMSOL Conference 2023 Collection

MEMS and Nanotechnologyx

Powerful automation and optimization methods for Material- and Process analysis with COMSOL Multiphysics and Matlab

T. Frommelt
SGL Group, Technology & Innovation, Meitingen, Germany

Thomas Frommelt received his PhD in physics in 2007 from the University of Augsburg for experimental work and simulation analysis on acoustically driven microfluidic mixing. In 2008, he joined the SGL Group and introduced COMSOL Multiphysics as the tool for flexible equation based ... Read More

Robust and Reliability-based Design Optimization of Electromagnetic Actuators Using Heterogeneous Modeling with COMSOL Multiphysics and Dynamic Network Models

H. Neubert[1], A. Kamusella[1], and T-Q. Pham[2]
[1]Technische Universität Dresden, Germany
[2]OptiY e. K. Aschaffenburg, Germany

For an exemplary electromagnetic actuator used to drive a Braille printer, a design optimization was performed. The optimization involves stochastic variables and comprises nominal optimization, robustness analysis and robust design optimization. A heterogeneous model simulates the ... Read More

Simulation of DC Current Sensor

K. Suresh, B.V.M.P.S. Kumar, U.V. Kumar, M. Umapathy, and G. Uma
National Institute of Technology Tiruchirapalli, Tamil Nadu, India

A proximity DC current sensor using of a piezo sensed and actuated cantilever beam with a permanent magnet mounted at its free end is designed and simulated in COMSOL Multiphysics. The change in resonant frequency of cantilever is a measure of the current through the wire. The sensor is ... Read More

MEMS Comb Drive Gap Reduction Beyond Minimum Feature Size: A Computational Study

N. Osonwanne, and J.V. Clark
Purdue University, West Lafayette, IN, USA

In this paper we present a method to reduce the comb drive gap in micro electro mechanical systems (MEMS) beyond the minimum fabrication feature size. The benefit of reducing the gap space between comb drive fingers is to increase its sensitivity to changes in capacitance due to ... Read More

Design of High Performance Condenser Microphone Using Porous Silicon

S. Suganthi[1], M. Anandraj[2], and L. Sujatha[1]
[1]Department of Electronics & Communication Engineering, Rajalakshmi Engineering College, Chennai, India
[2]Department of Physics, Rajalakshmi Engineering College, Chennai, India

Porous Silicon (PS) can easily be formed by electrochemical etching of silicon in HF based electrolytes at room temperature. Since, PS is compatible with silicon IC technology; it finds lot of applications in the fabrication of MEMS devices. In the current study, we discuss the design of ... Read More

MEMS Test Structures for Residual Stress Measurements

A. Sharma[1], K. Rangra[1], M. Kaur[1], and D. Kumar[2]
[1]Central Electronics Engineering Research Institute, Pilani, Rajasthan, India
[2]Kurukshetra University, Kurukshetra, Haryana, India

A set of microstructures for in situ stress measurement is presented, based on a lancet principle having dedicated designs for the amplification of dimensional variation induced by internal stress of the materials. The presented technique has an advantage over the traditional rotating ... Read More

MEMS Structure for Energy Harvesting

S. Rabbani, P.K. Rathore, G. Ghosh, and B.S. Panwar
Indian Institute of Technology Delhi, New Delhi, India

In this paper, a piezoelectric cantilever is investigated using finite element analysis made possible by COMSOL Multiphysics for the generation of electrical energy. A micro power generator was designed to convert mechanical vibrations present in the environment to electrical power. The ... Read More

Multiphysics System Simulation for MEMS Inertial Sensors

R. Sattler
University of Applied Sciences, Regensburg, Germany

This paper gives an overview of modelling microsensors on geometry and system level. The focus will be on the generation of the multiphysics reduced order system model and the coupling with package and ASIC models. The method is based on modal superposition. This means all the details of ... Read More

A Methodology For The Simulation Of MEMS Spiral Inductances Used As Magnetic Sensors

S. Druart, D. Flandre, and L.A. Francis
Université catholique de Louvain - ICTEAM, Louvain-la-Neuve, Belgium

In this paper, a methodology to simulate the electric behavior of spiral inductances is presented and discussed. All the methodology is built with the COMSOL software used with the Matlab scripting interface and then allows performing fully parameterized simulations. The program ... Read More

Thermally Induced-Noise Reduction Using an Electrostatic Force Feedback

H. Lee, and J.V. Clark
Purdue University, West Lafayette, IN, USA

In this paper we present a method to mitigate the effect of thermally-induced noise in Micro-Electro-Mechanical Systems (MEMS) through a force feedback circuit. Inherent noise-induced vibrations, which would be inconsiderable in macro scale, are considered as a limitation in micro- and ... Read More