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capacitance vs frequency

Posted Jan 11, 2012, 4:00 a.m. EST MEMS & Nanotechnology, MEMS & Piezoelectric Devices Version 4.2a 2 Replies

Anis Nordin
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Hi there,

I am designing MEMS device and need to find the result in term of capacitance and resonance frequency.
I have trying to obtain that result but the issue still persist. I am using Comsol 4.2A and chose electromechanics(emi) as my physic subject. I followed the tutorial but only 2d example because I need to design 3d object.
My design also including frequency domain and pertubation also. Does anyone know?
Kindly Pls help and guide me.FYI, I managed to find the result between total displacement, voltage but no solution for capacitance.




2 Replies Last Post Jan 12, 2012, 3:29 a.m. EST
Ivar KJELBERG COMSOL Multiphysics(r) fan, retired, former "Senior Expert" at CSEM SA (CH)
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Posted: 1 decade ago Jan 11, 2012, 6:47 a.m. EST
Hi

You have some interesting examples in the model library (do not forget to update it regularly) such as the tunable MEMS capacitor. And perhaps the "squeezed film accelerometer" model in the mems module.
There are more models and webinars on the main COMSOL web site

--
Good luck
Ivar
Hi You have some interesting examples in the model library (do not forget to update it regularly) such as the tunable MEMS capacitor. And perhaps the "squeezed film accelerometer" model in the mems module. There are more models and webinars on the main COMSOL web site -- Good luck Ivar
Anis Nordin
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Posted: 1 decade ago Jan 12, 2012, 3:29 a.m. EST
Hi,

Thanks Ivar

Cheers:-)
Hi, Thanks Ivar Cheers:-)

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