Computing the Plasma Impedance

Application ID: 54381


This tutorial model demonstrates how to compute the impedance of a capacitively coupled plasma. The Time Periodic study computes the time periodic solution of the plasma. Subsequently, the solution is transformed to the time domain, after which the fast Fourier transform (FFT) solver is called. This allows the plasma impedance to be computed for a given set of input parameters. This impedance value is useful when designing matching networks.

This model example illustrates applications of this type that would nominally be built using the following products: