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Dipolar Microwave Plasma Source

Application ID: 10512

This model presents a 2D axisymmetric dipolar microwave plasma source sustained through resonant heating of the electrons. This is known as electron cyclotron resonance (ECR), which occurs when a suitable high magnetic flux density is present along with the microwaves.

This is an advanced model that showcases many of the features that make COMSOL unique, including:

  • Infinite elements for the magnetostatic model.
  • Functional-based mesh adaption to create a fine mesh on the ECR surface.
  • PMLs for the electromagnetic waves to represent
  • Degrees of freedom for all 3 components of the high-frequency electric field despite the fact that the problem is geometrically axisymmetric.
  • Full anisotropic tensors for the plasma conductivity and charged particle transport properties.
  • Resonant power absorption in the ECR surface by the electrons.
  • Equation-based modeling using integrated quantities to fix the total absorbed power.
  • Solver sequencing to first compute the static magnetic field, then solve for all the plasma components.
This model requires the Plasma, AC/DC and RF modules.

This application was built using the following:

Plasma Module

The combination of COMSOL® products required to model your application depends on the physics interfaces that define it. Particular physics interfaces may be common to several products (see the Specification Chart for more details). To determine the right combination of products for your project, you should evaluate all of your needs in light of each product's capabilities, consultation with the COMSOL Sales and Support teams, and the use of an evaluation license.