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Thin-Film BAW Composite Resonator

Application ID: 5784

Bulk Acoustic Wave (BAW) resonators can be used as narrow band filters in radio-frequency applications. The chief advantage compared with traditional ceramic electromagnetic resonators is that BAW resonators, thanks to the acoustic wavelength being much smaller than the electromagnetic wavelength, can be made much smaller.

In addition to the desired bulk acoustic mode, the resonator structure may have many spurious modes with very narrow spacing. The design goal is usually to maximize the quality of the main component and to reduce the effect of spurious modes.

This example shows how you can model thin film BAW resonators in 2D using eigenfrequency and frequency response analysis.

This application was built using the following:

MEMS Module

The combination of COMSOL® products required to model your application depends on the physics interfaces that define it. Particular physics interfaces may be common to several products (see the Specification Chart for more details). To determine the right combination of products for your project, you should evaluate all of your needs in light of each product's capabilities, consultation with the COMSOL Sales and Support teams, and the use of an evaluation license.