Application Gallery

The Application Gallery features COMSOL Multiphysics tutorial and demo app files pertinent to the electrical, mechanical, fluid, and chemical disciplines. You can download ready-to-use tutorial models and demo apps with step-by-step instructions for how to create them yourself. The examples in the gallery serve as a great starting point for your own simulation work.
Use the Quick Search to find tutorials and apps relevant to your area of expertise. Log in or create a COMSOL Access account that is associated with a valid COMSOL license to download the MPH-files.

DC Glow Discharge

DC glow discharges in the low-pressure regime have long been used for gas lasers and fluorescent lamps. DC discharges are attractive to study because the solution is time independent. The 1D and 2D models show how to use the DC Discharge interface to set up an analysis of a positive column. The discharge is sustained by emission of secondary electrons at the cathode.

Drift Diffusion Tutorial

The Drift Diffusion interface solves a pair of reaction/advection/diffusion equations, one for the electron density and the other for the mean electron energy. This tutorial example computes the electron number density and mean electron energy in a drift tube. Electrons are released due to thermionic emission on the left boundary with an assumed mean electron energy. The electrons are then ...

Dielectric Barrier Discharge

This model simulates electrical breakdown in an atmospheric pressure gas. Modeling dielectric barrier discharges in more than one dimension is possible, but the results can be difficult to interpret because of the amount of competing physics in the problem. In this simple model the problem is reduced to 1D by assuming the dielectric gap is much smaller than the diameter of the plates. To ...

Atmospheric Pressure Corona Discharge

This model simulates a negative corona discharge occurring in between two co-axially fashioned conductors. The negative electric potential is applied to the inner conductor and the exterior conductor is grounded. The modeled discharge is simulated in argon at atmospheric pressure.

3D ICP Reactor, Argon Chemistry

3D plasma modeling is possible to do in COMSOL. A square coil is placed on top of a dielectric window and is electrically excited at 13.56MHz. A plasma is formed in the chamber beneath the dielectric window, which contains Argon gas at low pressure (20 mtorr). The gas flows into the process chamber from two 2 inch ports and the gas is extracted through a single 4 inch port. The plasma is ...

Electronegative inductively coupled plasma

Electronegative plasmas exhibit different characteristics than electropositive discharges due to the presence of negative ions. This model simulates an inductively coupled plasma for a mixture of Argon (30%) and Oxygen (70%). The plasma chemistry consists of 62 reactions and 15 species. The negative ions are held in the core of the plasma because they cannot escape the ambipolar field.

Surface Chemistry Tutorial

Surface chemistry is often the most important and most overlooked aspect of reacting flow modeling. Surface rate expressions can be hard to find or not even exist at all. Often it is preferable to use sticking coefficients to describe surface reactions because they can be estimated intuitively. The tutorial model simulates outgassing from a wafer during a chemical vapor deposition (CVD) ...

Ion Energy Distribution Function

One of the most useful quantites of interest after solving a self-consistent plasma model is the ion energy distribution function (IEDF). The magnitude and shape of the IEDF depends on many of the discharge parameters; pressure, plasma potential, sheath width etc. At very low pressures the plasma sheath is said to be collisionless, meaning that the ion energy is not retarded by collisions with ...

Thermal Plasma

This model simulates a plasma at medium pressure (2 torr) where the plasma is still not in local thermodynamic equilibrium. At low pressures the two temperatures are decoupled but as the pressure increases the temperatures tend towards the same limit.

GEC ICP Reactor, Argon Chemistry

The GEC cell was introduced by NIST in order to provide a standardized platform for experimental and modeling studies of discharges in different laboratories. The plasma is sustained via inductive heating. The Reference Cell operates as an inductively-coupled plasma in this model. This model investigates the electrical characteristics of the GEC reference cell for argon chemistry.

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