Design and Simulation of Underwater Acoustic MEMS sensor

S. Prabhu [1], Nagbhushan [1],
[1] Nitte Meenakshi Institute of Technology, Bengaluru, Karnataka, India
Published in 2015

Silicon based MEMS have wide applications in under water sensors. This work aims one such applications, hydrophone. Hydrophone detects the pressure variations of acoustic signals and noise in the water and produces an output voltage proportional to the pressure. Here the attempt is made to design and simulate MEMS based underwater acoustic sensor whose working is based on piezoresistive physics. Piezoresistive transducers translate a force in to a change in the value electrical resistance, which is then converted into voltage output by a Wheatstone bridge circuit and thus realizes vector detection of underwater acoustic signal.