Microwave Plasma Simulation Applied to a Double ICP Jet Reactor

H.-E. Porteanu, and R. Gesche
Ferdinand-Braun-Institut
Berlin, Germany
Published in 2011

ICP reactors are usually meter sized and driven at RF frequencies, for example at 13.56 MHz. We developed a miniature resonator allowing an inductive type of coupling of microwaves at 2.45 GHz to a plasma jet, flowing in ceramic tubes. Previous experiments and simulations show an efficient energy transfer of microwaves to plasma of about 80 %.

The new development of our ICP structure contains two ceramic tubes and a symmetrical arrangement of two resonators. The present papers concentrates on a study of this plasma source, considering the complex interaction of the electromagnetic field with the plasma and the gas flow, using the plasma module of COMSOL.