Robust Design and Optimization of Thick Film Accelerometers in COMSOL Multiphysics with OptiY

H. Neubert1, A. Kamusella1, and T. Q. Pham2
1Institute of Electromechanical and Electronic Design, Technische Universit├Ąt Dresden, Dresden, Germany
2OptiY e.K., Aschaffenburg, Germany

The optimization of design parameters with regard to tolerances is an important reason for design processing. We used a COMSOL Multiphysics structural mechanics model with the OptiY tool for finding an optimized design of a thick film accelerometer conforming to our sensitivity and cross sensitivity requirements, including resonance frequency.

We calculated the probability of a system failure due to relevant tolerances of the design parameters obtained from a sensitivity analysis.

In the final step, we will be able to calculate a robust design of the ceramic thick film accelerometer.