B. S. Kavitha, S. B. Rudraswamy, C. R. Venugopal
SJCE, Mysore, Karnataka, India
This paper will describe the dependence of capacitive accelerometer characteristics on the accelerometers physical dimension and its material properties. The sense element of the accelerometer is designed on the basis of a commercially available torsion based accelerometer technology. The sense element consists of an asymmetrically shaped flat plate of metal supported above a substrate surface by ...
T. Satyanarayana, V. Sai Pavan Rajesh
NPMASS Centre, Lakireddy Bali Reddy Autonomous Engineering College, Mylavaram, Andhra Pradesh, India
Lakireddy Bali Reddy Autonomous Engineering College, Mylavaram, Andhra Pradesh, India
The most commonly used type of resonator is the AT-cut, where the quartz blank is in the form of a thin plate cut at an angle to the optic axis of the crystal. This paper reports the modeling of a quartz oscillator for a resonant frequency analysis based on piezoelectric effects. The proposed oscillator consists of a single quartz disc with two electrodes on the top and bottom surfaces of the ...
S. M. Ali, A. K. Jha, S. Mahapatra, M. Panigrahi
Trident Academy of Technology, Bhubaneswar, Odisha, India
Nearly seven lakh Indians die of cancer, while over 10 lakh are newly diagnosed with some form of the disease every year. Surgical resection is not always feasible in patients with hepatocellular carcinoma. Microwave Coagulation Therapy (MCT) has been used as an alternative to resection and its efficiency has been evaluated in tissue microwave irradiation from a dipole antenna causes water ...
N. J. Krishnapriya, M. R. Baiju
College of Engineering, Trivandrum, Kerala, India
In this paper, design and analysis of a novel MEMS capacitive microphone which uses corrugations and perforations in diaphragm is presented. The corrugation and perforation in diaphragm reduces the residual stress and increases the mechanical sensitivity of diaphragm. Instead of the perforated back plate, holes have been made on the diaphragm. Therefore, potassium hydroxide (KOH) etching can be ...
F. Wittbracht, A. Weddemann, A. Auge, and A. Hütten
Department of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
In this work, we show that dipolar magnetic coupling can be used to control the particle flow through microfluidic structures without changing the state of motion of the carrier liquid. Also no external magnetic gradient fields are employed; the total external magnetic force applied is therefore zero. The theoretical idea will be tested experimentally. Here, additional effects originating from ...
H. Sun, and F. Jamil
University of Massachusetts, Lowell
The micromixer is one of the important components of Lab-On-a-Chip, but where the molecular diffusion, which is often a slow process, limits the mixing efficiency of two or more streams due to the unique laminar flows in these micro scale devices. This paper studies a mixing concept based on a vibrating micro-plate in the microfluidic channels to achieve an efficient mixing ability. A ...
S. Aoyagi1, and Y.-C. Tai2
1Robot & Microsystem Laboratory, Kansai University, Osaka, Japan
2Caltech Micromachining Laboratory, California Institute of Technology, Pasadena, USA
A new type of accelerometer is demonstrated which consists of a dielectric seismic mass and a comb-shaped planar capacitor underneath it. The simple structure of the device allows the use of polymer Parylene as the proof mass, so the technology is greatly simplified and only surface micromachining is required. The measuring principle is detecting capacitance change according to the dielectric ...
N. Al Cheikh, P. Xavier, J. Duchamp, and K. Schuster
Institute of Microelectronics, Electromagnetism and Photonics (IMEP-LAHC), Grenoble, France
Institute of Millimetrics Radio Astronomy (IRAM), Grenoble, France
Superconducting GHz electronics circuits are frequently used in Radio Astronomy instrumentation. The features of these instrumentations can be significantly improved by using tuneable capacitances, which can be realized by electrically actuated, micromechanical bridges (MEMS) made of superconducting Niobium (Nb). In order to analyze the electromechanical behavior of such devices and the intrinsic ...
Design and Development of Microsystems within a Corporate Research Environment by Utilizing Comsol Multiphysics
Corporate Research & Technologies
Alexander Frey received his M.A. degree from the University of Texas, Austin, in 1994, the Dipl. Phys. degree from the University of Wuerzburg, Germany in 1997 and the PhD from the Saarland University, Germany in 2010. In 1997 he joined Research Laboratories of Siemens working on the design of DRAM sensing circuits. In 1999 he joined Corporate Research, Infineon, Munich, Germany. He was engaged ...
L.B.M. Silva, E.J.P. Santos
Laboratory for Devices and Nanostructures, Electronics and Systems Department, Universidade Federal de Pernambuco, Recife, PE, Brasil
Transducer optimization is a key aspect for successful development and deployment of advanced sensors, especially when designing 3D structures for harsh environments. For piezoelectric transducers, plate thickness determines the operating frequency of the resonator, which is frequently tuned in the shear thickness vibration mode. Quartz has been the material of choice for the fabrication of bulk ...