AC Electrothermal Characterization of Doped-Si Heated Microcantilevers Using Frequency-Domain Finite Element Analysis - new
K. Park, S. Hamian, A. M. Gauffreau, T. Walsh
Mechanical Engineering Department, University of Utah, Salt Lake City, UT, USA
Department of Mechanical, Industrial & Systems Engineering, University of Rhode Island, Kingston, RI, USA
This work investigates the frequency-dependent electrothermal behaviors of freestanding doped-silicon heated microcantilever probes operating under the periodic (ac) Joule heating. The transient heat conduction equation for each component (i.e., the low-doped heater region, the high-doped constriction region, and the high-doped leg region) is solved using the general heat transfer module for DC ...
Designing the Actuator for the Next-Generation Astronomical Deformable Mirrors: a Multidisciplinary and Multiphysics Approach
C. Del Vecchio, R. Biasi , D. Gallieni, and A. Riccardi
INAF-OAA, Fierenze, Italy
Microgate Srl, Bolzano, Italy
ADS International Srl, Valmadrera, Italy
The actuation system of the deformable mirror is one of the crucial components of an Adaptive Optics unit. One possible implementation comprehends a linear force motor and a capacitive sensor providing the feedback measure signal. Choosing a magnetic circuit that makes optimum use of the magnetic force delivered by a current and properly arranging the electrostatic geometry allows to obtain very ...
V. Vijayalakshmi, K. C. Devi
PSG College of Technology, Coimbatore, Tamil Nadu, India
In this work, a bimetallic strip based thermal sensor was designed using MEMS module of COMSOL Multiphysics® software to monitor the temperature rise in insulating oil which was used as coolant in transformers. The bimetallic strip was designed with different shapes such as cylindrical, rectangle, square & conical and different compositions such as Al/Steel Alloy and Fe/Cu which can withstand ...
High Coupling Factor Piezoelectric Materials for Bending Actuators: Analytical and Finite Elements Modeling Results
I.A. Ivan, M. Rakotondrabe, and N. Chaillet
FEMTO-ST Institute, University of Franche-Comte, Besançon, France
New giant piezoelectric factor materials such as PMN-PT and PZN-PT were researched during the last decade and are actually becoming commercially available. As they seem very attractive for actuator designs, we studied their potential in replacing PZT ceramics. In a first comparative approach, we tested a series of classic rectangular composite bimorph structures of different combinations of ...
Experimentally Matched Finite Element Modeling of Thermally Actuated SOI MEMS Micro-Grippers Using COMSOL Multiphysics
M. Guvench, and J. Crosby
University of Southern Maine, Gorham, Maine, USA
In “Micro-Electro-Mechanical-Systems” shortly known as MEMS, one of the most important and effective principle of creating transduction of electrical power to displacement force is thermal expansion. A slim beam of MEMS material, typically Silicon, is heated by the application of electrical current via Joule heating; it expands and creates motion. In the design of many MEMS devices ...
S. Suganthi, M. Anandraj, and L. Sujatha
Department of Electronics & Communication Engineering, Rajalakshmi Engineering College, Chennai, India
Department of Physics, Rajalakshmi Engineering College, Chennai, India
Porous Silicon (PS) can easily be formed by electrochemical etching of silicon in HF based electrolytes at room temperature. Since, PS is compatible with silicon IC technology; it finds lot of applications in the fabrication of MEMS devices. In the current study, we discuss the design of a condenser microphone using a Silicon/ Porous Silicon composite membrane as a movable plate. The performance ...
A. Beerwinkle, R. Singh, and G. Kirikera
Mechanics of Advanced Materials Laboratory, School of Mechanical and Aerospace Engineering, Oklahoma State University, Tulsa, OK
Geophysical Research Company, LLC, (GRC) Tulsa, OK
A three-dimensional finite element model, based on the linear field equations for superimposed small vibrations onto nonlinear thermoelastic stressed media given by Lee and Yong, was developed. This method involves solving the thermal stress and piezoelectric model with geometric and material nonlinearities. The thickness-shear mode frequency response of the model was benchmarked to ...
M. Silambarasan, T. Prem Kumar, M. Alagappan, and G. Anju
PSG College of Technology
Tamil Nadu, India
The present work aims to develop a blood pressure sensor using MEMS/NEMS technology. A normal blood pressure detector is used externally, but this work mainly aims for designing an implantable nanotube based sensor for continuous monitoring of blood pressure. The use of COMSOL Multiphysics 4.1 acts as a good platform to develop a nano tube based sensor design by using the MEMS module. The ...
This paper covers the following: * All-Optical Light Modulation of surface plasmon polaritons (SPPs) is achieved using asymmetric single nanoslits. A high on/off switching ratio of >20 dB and phase variation of >? were observed with the device lateral dimension of only about 2 ?m. * Efficient unidirectional excitation of SPP as well as beam splitting are achieved using the dielectric–film ...
Modeling of Silicon Piezoresistive Pressure Sensor: Application to Prevent Some Diabetes Complications
F. Kerrour, A. Beddiaf, M. Benabbas-Marir
MODerNa Laboratory, University Mentouri, Constantine, Algeria
Several analytical solutions describing the mechanical behavior of a silicon micro membrane deflection, perfectly embedded and subjected to a uniform and constant pressure have been proposed. The obtained results are compared with those obtained by using COMSOL software for a rectangular diaphragm deflection. COMSOL Multiphysics is powerful software for solving problems based on partial ...